The esteemed Mr. Bombadil aside, the Silmarillion states that Ents would come at the awakening of the Elves. Yavanna had conceived of them in the music of the Ainur and they are as old as any of the children of Eru but.
Quote:
Behold! When the Children awake, then the thought of Yavanna will awake also, and it will summon spirits from afar, and they will go among the kelvar and the olvar, and some will dwell therein, and be held in reverence, and their just anger shall be feared.
|
These words were related by Manwe to Yavanna as they had been spoken by Eru Himself. I suppose it could be argued that the spirits summoned by the thought of Yavanna were older than the Elves, but this is getting pretty picky